Implementation of a four probes measuring system to determine the resistivity of thin films with temperature dependence

dc.contributor.advisorGuerra Torres, Jorge Andrés
dc.contributor.advisorStröhla, Tom
dc.contributor.authorSalas Casapino, Carlos Albertoes_ES
dc.date.accessioned2017-06-19T22:33:20Zes_ES
dc.date.available2017-06-19T22:33:20Zes_ES
dc.date.created2017es_ES
dc.date.issued2017-06-19es_ES
dc.description.abstractResistivity measurements in thin film samples depending on the temperature and on the lm thickness is always a subject of interest, above all when it comes to new materials. This work presents the implementation of a measuring system for thin fi lm resistivity based on four probes showing the dependency of the resistivity on the temperature as well as on the film thickness. In order to change the temperature of the samples, a heat source based on a Peltier element was implemented into the measuring system. A Graphical User Interface using a LabVIEW software controls all the devices of the measuring system and allows the user to calculate the thin lm resistivity choosing between four measuring method: Van der Pauw, Modi ed Van der Pauw, Linear Van der Pauw and Linear Four Probes methods. Resistivity in aluminum and tungsten thin lm samples with 100, 300, and 600 nm thickness were measured at temperatures between 303K and 373K with increments of 5 K. The results obtained are higher than bulk resistivity values and agrees with the present theory. Moreover, it is shown that the resistivity values obtained and its corresponding temperature coeficients increases as the film thickness decreases.es_ES
dc.description.uriTesises_ES
dc.identifier.urihttp://hdl.handle.net/20.500.12404/8832
dc.language.isoenges_ES
dc.publisherPontificia Universidad Católica del Perúes_ES
dc.publisher.countryPEes_ES
dc.rightsinfo:eu-repo/semantics/openAccesses_ES
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/2.5/pe/*
dc.subjectPelículas delgadases_ES
dc.subjectResistividades_ES
dc.subject.ocdehttps://purl.org/pe-repo/ocde/ford#2.00.00es_ES
dc.titleImplementation of a four probes measuring system to determine the resistivity of thin films with temperature dependencees_ES
dc.typeinfo:eu-repo/semantics/masterThesises_ES
renati.advisor.dni46163725
renati.discipline713167es_ES
renati.levelhttps://purl.org/pe-repo/renati/level#maestroes_ES
renati.typehttp://purl.org/pe-repo/renati/type#tesises_ES
thesis.degree.disciplineIngeniería Mecatrónicaes_ES
thesis.degree.grantorPontificia Universidad Católica del Perú. Escuela de Posgradoes_ES
thesis.degree.levelMaestríaes_ES
thesis.degree.nameMaestro en Ingeniería Mecatrónicaes_ES

Files

Original bundle

Now showing 1 - 1 of 1
Thumbnail Image
Name:
SALAS_CARLOS_PROBES_MEASURING_RESISTIVITY_FILMS_TEMPERATURE.pdf
Size:
10.05 MB
Format:
Adobe Portable Document Format
Description:
Texto completo

License bundle

Now showing 1 - 1 of 1
No Thumbnail Available
Name:
license.txt
Size:
1.33 KB
Format:
Item-specific license agreed upon to submission
Description: