Browsing Ingeniería Mecatrónica (Mag.) by Subject "Sistemas microelectromecánicos"
Now showing items 1-1 of 1
-
FEM simulation of residual stresses of thin films for applications in MEMS
(Pontificia Universidad Católica del PerúPE, 2017-06-19)In MEMS sensors, such as resonators based on cantilever and doubly-clamped beams, the presence of residual stresses in the thin films disrupt their mechanical properties or eigenfrequencies and, in some cases, can destroy ...