Browsing by Subject "Sistemas microelectromecánicos"
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FEM simulation of residual stresses of thin films for applications in MEMS
(Pontificia Universidad Católica del PerúPE, 2017-06-19)In MEMS sensors, such as resonators based on cantilever and doubly-clamped beams, the presence of residual stresses in the thin films disrupt their mechanical properties or eigenfrequencies and, in some cases, can destroy ... -
Synthesis, tribology, electro-tribology and mechanical performance of ti2alc and ti3alc2 max phases thin films
(Pontificia Universidad Católica del PerúPE, 2023-01-26)This thesis investigates the synthesis, mechanical properties, tribological and electro-tribological behavior of Ti2AlC and Ti3AlC2 MAX phases in the form of thin films. The thin films were obtained by deposition of a ...