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Effect of thermal annealing treatments on the optical and electrical properties of aluminum-doped, amorphous, hydrogenated silicon carbide thin films
(Pontificia Universidad Católica del Perú, 2019-07-04)
In this work, a systematic study of the structural, optical and electrical properties of aluminum doped hydrogenated amorphous silicon carbide (Al-doped a-SiC:H) thin films grown by radio frequency magnetron sputtering is ...