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    • Estudio de un magnetrón utilizando el método de elementos finitos 

      Pérez Caro, Erik Alfredo (Pontificia Universidad Católica del PerúPE, 2021-02-01)
      Magnetron sputtering system is a technique that consists in extracting atoms from a target material by collisions of energetic ions of an inert gas. It is widely used in semiconductor industries and materials processing ...