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Construction and implementation of a 4-probe measuring system to determinate the temperature dependent sheet resistance of thin films
(Pontificia Universidad Católica del Perú, 2017-04-12)
In order to build machines, electronic devices, it is necessary to know all properties of the materials.
The machines and electronic devices use parts that are interconnected, the mechanical properties
are important, but ...
FEM simulation of residual stresses of thin films for applications in MEMS
(Pontificia Universidad Católica del Perú, 2017-06-19)
In MEMS sensors, such as resonators based on cantilever and doubly-clamped beams, the presence of residual stresses in the thin films disrupt their mechanical properties or eigenfrequencies and, in some cases, can destroy ...