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Optical system to observe an measure the spectra of a light emitting substrate and plasma in a RF magnetron
(Pontificia Universidad Católica del Perú, 2017-09-06)
To obtain spectra of a light emitting substrate during the deposition of Terbium (Tb) doped thin films by RF magnetron sputtering, an optomechanical device is developed, constructed and tested. The device is required ...