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    • FEM simulation of residual stresses of thin films for applications in MEMS 

      Macavilca Román, José Carlos (Pontificia Universidad Católica del Perú, 2017-06-19)
      In MEMS sensors, such as resonators based on cantilever and doubly-clamped beams, the presence of residual stresses in the thin films disrupt their mechanical properties or eigenfrequencies and, in some cases, can destroy ...